空气净化
洁净的生产环境是生产工艺的需要，是确保产品的成品率和产品质量的可靠性、长寿命所必须得。随着我国国民经济的发展，各行各业对生产环境的温度、相对湿度和洁净度的要求也越来越高。例如：大规模和超大规模集成电路的发展很快，在1980年时其集成度只有64KB，而到目前集成度已提高到1GB或更高；64KB集成电路前工序生产所要求生产环境的空气洁净度等级只有4级和5级，而1GB集成电路前工序生产对生产环境洁净度等级的要求提高到1级和2级。
不同的生产工艺、不同的生产工序对生产环境的要求也是不相同的，因此，确定洁净室的空气洁净度等级时应根据不同工艺、不同工序对环境的洁净度要求而定。
根据不同生产工艺、不同生产工序对环境洁净度的不同要求，该高则高，该低则低，尽量缩小高洁净度等级部分的面积，以局部高等级净化和全室较低等级净化的洁净室系统代替全室高等级净化的洁净室系统。既能确保不同生产工艺对生产环境的要求，又能大幅度地降低初投资和运行费用 。
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